Skip to content

STEM Simulation

STEM (Scanning Transmission Electron Microscopy) simulation computes scanning transmission electron microscopy images using the Bloch-wave method.

Simulator in STEM mode

This page lists every setting that appears on the right when Image mode = STEM. For the result display, brightness, and normalisation controls on the left, see the overview page. Only the STEM-specific display target is repeated below.


Overview

A convergent electron beam is scanned across the specimen, and the transmitted and scattered electrons at each scan position are collected by annular detectors. ReciPro computes the STEM image with the Bloch-wave method (dynamical calculation).

Calculation flow

  1. At each scan position, compute the diffracted intensities with the Bloch-wave method for every incident direction of the convergent probe.
  2. Integrate the scattered intensity over the detector's angular range.
  3. Both elastic and thermal-diffuse scattering (TDS) contributions can be computed.

See Appendix A3.4 — STEM calculation for the theory.


Detector types

Detector Angle range Main contribution Contrast
BF (bright field) 0 – convergence angle Elastic Phase contrast
ABF (annular bright field) Inner part of the convergence angle Elastic Light-element sensitive
LAADF (low-angle annular dark field) Just outside the convergence angle Elastic + TDS Strain sensitive
HAADF (high-angle annular dark field) Well outside the convergence angle TDS (inelastic) Z-contrast (\(\propto Z^2\))

Typical detector settings (each available with one click from the right-click menu of the STEM options, all with convergence angle α = 25 mrad): BF (0–5 mrad) / ABF (12–24 mrad) / LAADF (26–60 mrad) / HAADF (80–250 mrad)


Specimen parameters

Specimen parameters

  • Thickness : specimen thickness (nm). This value is ignored in Serial image mode.

TEM conditions

TEM conditions

Parameter Description Default / typical
Acc. Vol. (kV) Accelerating voltage. The relativistically corrected electron wavelength is shown alongside 200 kV
Defocus Δf Defocus of the objective (probe-forming) lens (nm) −57.8 nm
Cs Spherical aberration coefficient (mm). Affects the probe size 0.5–1.0 mm
Cc Chromatic aberration coefficient (mm) 1.0–2.0 mm
ΔV (FWHM) Full width at half maximum of the electron energy spread (eV) 0.5–2.0 eV

β (illumination semi-angle) is disabled in STEM mode, because the convergence angle α takes its role.


STEM options (optical)

STEM options (optical)

Set the geometry of the convergent probe and the annular detector. Each angle is also shown converted to a reciprocal-space radius \(\sin\theta/\lambda\) (nm⁻¹) on the right.

Parameter Description Default / typical
α (convergence angle) Semi-angle of the convergent probe (mrad). Larger values give a finer probe and change the diffraction contrast 15–25 mrad
(Annular) detector inner angle Inner collection semi-angle of the annular detector (mrad). Signal inside this angle is excluded BF: 0, HAADF: 80
(Annular) detector outer angle Outer collection semi-angle of the annular detector (mrad). Signal outside this angle is excluded BF: 5, HAADF: 250
Effective source size σs (FWHM) Effective electron source size. Larger values blur the probe and reduce fine-detail contrast

STEM options (simulation)

STEM options (simulation)

  • Slice thickness for inelastic : specimen slice thickness (nm) used when computing the TDS (thermal-diffuse, inelastic) intensity. Smaller values are more accurate but slower.
  • Angular resolution : angular sampling resolution of the incident probe directions (mrad). Smaller values sample the probe more finely but are slower.

Image mode (single / serial)

Image mode

  • Single image : compute one STEM image at the current thickness.
  • Serial image : generate a series of images with thickness / defocus stepped in stages (set by Start / Step / Num; the list below can also be edited directly).

Image property

Image property

  • Size (W×H) : number of pixels in the scanned image (default 512×512). In STEM this equals the number of scan points and scales the computation time linearly.
  • Resolution : sampling resolution (pm/px).

Diffracted waves

Diffracted waves

  • Max Bloch waves : maximum number of Bloch waves used in the Bethe method (default 80). The eigenvalue-problem cost scales as the cube of the number of waves.

STEM display target (result side)

STEM image

The display switch at the bottom-left of the window selects which scattering component of the already-computed STEM image to show (switchable without recomputing).

Display target Description
Elastic Elastic-scattering only image
TDS Thermal-diffuse-scattering only image
Elastic & TDS Sum of elastic + TDS

Computational cost

STEM simulation is computationally expensive, so set the following parameters appropriately.

Factor Impact
Convergence angle Larger → more CBED disk overlap → higher cost
Bloch waves Eigenvalue-problem cost scales as N³
Angular resolution Finer → more accurate but cost scales as N²
Image pixels (Size) Linear scaling with the number of scan points

Importance of the temperature factor

For HAADF-STEM simulation, atoms must have a non-zero isotropic temperature factor (Debye-Waller factor). If the value is unknown, set \(B \approx 0.5\ \text{Å}^2\). With a zero temperature factor the TDS intensity is zero and the HAADF image is not computed correctly.

Detector Range Main contribution
BF, ABF Inside the convergence angle Elastic
LAADF, HAADF Outside the convergence angle Inelastic (TDS)

Comparison with Dr. Probe

ReciPro's STEM simulations have been confirmed to agree closely with the widely used Dr. Probe GUI (v1.10). The figure below compares the two for BF, ABF, LAADF and HAADF detectors over a thickness series (2.96–60.05 nm), both aberration-free (left) and with Cs = 0.2 mm, defocus = −25.9 nm (right). The two codes agree across all detector types and thicknesses.

STEM simulation comparison: Dr. Probe vs ReciPro

A more detailed report is available as a PDF: Comparison of STEM simulations by Dr. Probe GUI (v1.10) and ReciPro (v4.854).


See also